Inventor
LI GUOGUANG
US26 patents
⚠️ This page may combine multiple inventors who share the name “LI GUOGUANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
N & K TECHNOLOGY INC
16 patentsUS6392756B1May 21, 2002
Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate
N & K TECHNOLOGY INC123 citations97
US6091485AJul 18, 2000
Method and apparatus for optically determining physical parameters of underlayers
N & K TECHNOLOGY INC78 citations96
US7755775B1Jul 13, 2010
Broadband optical metrology with reduced wave front distortion, chromatic dispersion compensation and monitoring
N & K TECHNOLOGY INC19 citations92
US7289214B1Oct 30, 2007
System and method for measuring overlay alignment using diffraction gratings
N & K TECHNOLOGY INC23 citations92
US6379014B1Apr 30, 2002
Graded anti-reflective coatings for photolithography
N & K TECHNOLOGY INC26 citations92
US6327035B1Dec 4, 2001
Method and apparatus for optically examining miniature patterns
N & K TECHNOLOGY INC53 citations92
US7525672B1Apr 28, 2009
Efficient characterization of symmetrically illuminated symmetric 2-D gratings
N & K TECHNOLOGY INC23 citations91
US7391524B1Jun 24, 2008
System and method for efficient characterization of diffracting structures with incident plane parallel to grating lines
N & K TECHNOLOGY INC30 citations91
US7999936B1Aug 16, 2011
Combined transmittance and angle selective scattering measurement of fluid suspended particles for simultaneous determination of refractive index, extinction coefficient, particle size and particle density
N & K TECHNOLOGY INC16 citations82
US7349103B1Mar 25, 2008
System and method for high intensity small spot optical metrology
N & K TECHNOLOGY INC10 citations81
US6891628B2May 10, 2005
Method and apparatus for examining features on semi-transparent and transparent substrates
N & K TECHNOLOGY INC5 citations73
US7756677B1Jul 13, 2010
Implementation of rigorous coupled wave analysis having improved efficiency for characterization
N & K TECHNOLOGY INC6 citations63
US7253909B1Aug 7, 2007
Phase shift measurement using transmittance spectra
N & K TECHNOLOGY INC2 citations62
US7505147B1Mar 17, 2009
Efficient calculation of grating matrix elements for 2-D diffraction
N & K TECHNOLOGY INC4 citations61
US7397554B1Jul 8, 2008
Apparatus and method for examining a disk-shaped sample on an X-Y-theta stage
N & K TECHNOLOGY INC6 citations61
US7212293B1May 1, 2007
Optical determination of pattern feature parameters using a scalar model having effective optical properties
N & K TECHNOLOGY INC5 citations61
LI GUOGUANG
4 patentsUS8125641B2Feb 28, 2012
Method and apparatus for phase-compensated sensitivity-enhanced spectroscopy (PCSES)
LI GUOGUANG7 citations83
US8767209B2Jul 1, 2014
Broadband polarization spectrometer with inclined incidence and optical measurement system
LI GUOGUANG10 citations79
US9170156B2Oct 27, 2015
Normal-incidence broadband spectroscopic polarimeter containing reference beam and optical measurement system
LI GUOGUANG5 citations67
US9176048B2Nov 3, 2015
Normal incidence broadband spectroscopic polarimeter and optical measurement system
LI GUOGUANG0 citations46
NANOMETRICS INC
2 patentsBEIJING INST SPACECRAFT SYSTEM ENGINEERING
2 patentsUS11656034B2May 23, 2023
Positive-pressure-withstanding high-power flat evaporator, processing methods thereof and flat loop heat pipe based on evaporator
BEIJING INST SPACECRAFT SYSTEM ENGINEERING0 citations38
US11168945B2Nov 9, 2021
Preparation method of loop heat pipe evaporator
BEIJING INST SPACECRAFT SYSTEM ENGINEERING0 citations35