Inventor

TSENG TZU-CHUN

TW2 patents

⚠️ This page may combine multiple inventors who share the name “TSENG TZU-CHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

1 patent

US8906789B2Dec 9, 2014

Asymmetric cyclic desposition etch epitaxy

TAIWAN SEMICONDUCTOR MFG9 citations81

FUJIMI INC

1 patent

US11015087B2May 25, 2021

Polishing composition, method for producing polishing composition, polishing method, and method for producing semiconductor substrate

FUJIMI INC0 citations52