Inventor
CHEN SHUQIANG
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHEN SHUQIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
N & K TECHNOLOGY INC
6 patentsUS7289214B1Oct 30, 2007
System and method for measuring overlay alignment using diffraction gratings
N & K TECHNOLOGY INC23 citations92
US7525672B1Apr 28, 2009
Efficient characterization of symmetrically illuminated symmetric 2-D gratings
N & K TECHNOLOGY INC23 citations91
US7391524B1Jun 24, 2008
System and method for efficient characterization of diffracting structures with incident plane parallel to grating lines
N & K TECHNOLOGY INC30 citations91
US7253909B1Aug 7, 2007
Phase shift measurement using transmittance spectra
N & K TECHNOLOGY INC2 citations62
US7505147B1Mar 17, 2009
Efficient calculation of grating matrix elements for 2-D diffraction
N & K TECHNOLOGY INC4 citations61
US7212293B1May 1, 2007
Optical determination of pattern feature parameters using a scalar model having effective optical properties
N & K TECHNOLOGY INC5 citations61