Inventor
WIRNSBERGER THOMAS
AT17 patents
⚠️ This page may combine multiple inventors who share the name “WIRNSBERGER THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES AG
5 patentsUS9418883B2Aug 16, 2016
Device for holding wafer shaped articles
LAM RES AG3 citations72
US11195730B2Dec 7, 2021
Method and apparatus for processing wafer-shaped articles
LAM RES AG2 citations68
US10490426B2Nov 26, 2019
Method and apparatus for processing wafer-shaped articles
LAM RES AG1 citations57
US10056287B2Aug 21, 2018
Apparatus for treating surfaces of wafer-shaped articles
LAM RES AG0 citations50
US9887120B2Feb 6, 2018
Apparatus for treating surfaces of wafer-shaped articles
LAM RES AG0 citations40
SEMSYSCO GMBH
4 patentsUS11566337B2Jan 31, 2023
Substrate locking system, device and procedure for chemical and/or electrolytic surface treatment
SEMSYSCO GMBH0 citations59
US11908698B2Feb 20, 2024
Method and device for plating a recess in a substrate
SEMSYSCO GMBH0 citations58
US11164748B2Nov 2, 2021
Method and device for plating a recess in a substrate
SEMSYSCO GMBH1 citations58
US11965263B2Apr 23, 2024
Substrate holding and locking system for chemical and/or electrolytic surface treatment
SEMSYSCO GMBH0 citations43