Inventor
FOROUHI ABDUL RAHIM
US22 patents
⚠️ This page may combine multiple inventors who share the name “FOROUHI ABDUL RAHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
N & K TECHNOLOGY INC
19 patentsUS6128085AOct 3, 2000
Reflectance spectroscopic apparatus with toroidal mirrors
N & K TECHNOLOGY INC118 citations99
US6392756B1May 21, 2002
Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate
N & K TECHNOLOGY INC123 citations97
US6091485AJul 18, 2000
Method and apparatus for optically determining physical parameters of underlayers
N & K TECHNOLOGY INC78 citations96
US5991022ANov 23, 1999
Reflectance spectrophotometric apparatus with toroidal mirrors
N & K TECHNOLOGY INC65 citations96
US5880831AMar 9, 1999
Reflectance spectrophotometric apparatus with optical relay
N & K TECHNOLOGY INC54 citations96
US7289214B1Oct 30, 2007
System and method for measuring overlay alignment using diffraction gratings
N & K TECHNOLOGY INC23 citations92
US6379014B1Apr 30, 2002
Graded anti-reflective coatings for photolithography
N & K TECHNOLOGY INC26 citations92
US6327035B1Dec 4, 2001
Method and apparatus for optically examining miniature patterns
N & K TECHNOLOGY INC53 citations92
US6075612AJun 13, 2000
Optical devices having toroidal mirrors for performing reflectance measurements
N & K TECHNOLOGY INC29 citations92
US6710865B2Mar 23, 2004
Method of inferring optical parameters outside of a measurement spectral range
N & K TECHNOLOGY INC39 citations88
US6594025B2Jul 15, 2003
Method of monitoring thin-film processes and metrology tool thereof
N & K TECHNOLOGY INC24 citations88
US7999936B1Aug 16, 2011
Combined transmittance and angle selective scattering measurement of fluid suspended particles for simultaneous determination of refractive index, extinction coefficient, particle size and particle density
N & K TECHNOLOGY INC16 citations82
US7248364B2Jul 24, 2007
Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot size
N & K TECHNOLOGY INC11 citations82
US7349103B1Mar 25, 2008
System and method for high intensity small spot optical metrology
N & K TECHNOLOGY INC10 citations81
US6825933B2Nov 30, 2004
Computer-implemented reflectance system and method for non-destructive low dose ion implantation monitoring
N & K TECHNOLOGY INC9 citations73
US7397030B1Jul 8, 2008
Integrated local and global optical metrology for samples having miniature features
N & K TECHNOLOGY INC3 citations62
US7253909B1Aug 7, 2007
Phase shift measurement using transmittance spectra
N & K TECHNOLOGY INC2 citations62
US7327457B2Feb 5, 2008
Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes
N & K TECHNOLOGY INC5 citations60
US7330256B1Feb 12, 2008
Spectrophotometric system with reduced angle of incidence
N & K TECHNOLOGY INC0 citations50
ACTEL CORP
3 patentsUS5770885AJun 23, 1998
Electrically programmable antifuse incorporating dielectric and amorphous silicon interlayers
ACTEL CORP51 citations96
US5670818ASep 23, 1997
Electrically programmable antifuse
ACTEL CORP73 citations96
US5825072AOct 20, 1998
Circuits for ESD Protection of metal to-metal antifuses during processing
ACTEL CORP11 citations72