P

Inventor

FOROUHI ABDUL RAHIM

US22 patents
⚠️ This page may combine multiple inventors who share the name “FOROUHI ABDUL RAHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

N & K TECHNOLOGY INC

19 patents
US6128085AOct 3, 2000

Reflectance spectroscopic apparatus with toroidal mirrors

N & K TECHNOLOGY INC118 citations99
US6392756B1May 21, 2002

Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate

N & K TECHNOLOGY INC123 citations97
US6091485AJul 18, 2000

Method and apparatus for optically determining physical parameters of underlayers

N & K TECHNOLOGY INC78 citations96
US5991022ANov 23, 1999

Reflectance spectrophotometric apparatus with toroidal mirrors

N & K TECHNOLOGY INC65 citations96
US5880831AMar 9, 1999

Reflectance spectrophotometric apparatus with optical relay

N & K TECHNOLOGY INC54 citations96
US7289214B1Oct 30, 2007

System and method for measuring overlay alignment using diffraction gratings

N & K TECHNOLOGY INC23 citations92
US6379014B1Apr 30, 2002

Graded anti-reflective coatings for photolithography

N & K TECHNOLOGY INC26 citations92
US6327035B1Dec 4, 2001

Method and apparatus for optically examining miniature patterns

N & K TECHNOLOGY INC53 citations92
US6075612AJun 13, 2000

Optical devices having toroidal mirrors for performing reflectance measurements

N & K TECHNOLOGY INC29 citations92
US6710865B2Mar 23, 2004

Method of inferring optical parameters outside of a measurement spectral range

N & K TECHNOLOGY INC39 citations88
US6594025B2Jul 15, 2003

Method of monitoring thin-film processes and metrology tool thereof

N & K TECHNOLOGY INC24 citations88
US7999936B1Aug 16, 2011

Combined transmittance and angle selective scattering measurement of fluid suspended particles for simultaneous determination of refractive index, extinction coefficient, particle size and particle density

N & K TECHNOLOGY INC16 citations82
US7248364B2Jul 24, 2007

Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot size

N & K TECHNOLOGY INC11 citations82
US7349103B1Mar 25, 2008

System and method for high intensity small spot optical metrology

N & K TECHNOLOGY INC10 citations81
US6825933B2Nov 30, 2004

Computer-implemented reflectance system and method for non-destructive low dose ion implantation monitoring

N & K TECHNOLOGY INC9 citations73
US7397030B1Jul 8, 2008

Integrated local and global optical metrology for samples having miniature features

N & K TECHNOLOGY INC3 citations62
US7253909B1Aug 7, 2007

Phase shift measurement using transmittance spectra

N & K TECHNOLOGY INC2 citations62
US7327457B2Feb 5, 2008

Apparatus and method for optical characterization of a sample over a broadband of wavelengths while minimizing polarization changes

N & K TECHNOLOGY INC5 citations60
US7330256B1Feb 12, 2008

Spectrophotometric system with reduced angle of incidence

N & K TECHNOLOGY INC0 citations50

ACTEL CORP

3 patents