P

Inventor

BAO JUNWEI

US130 patents
⚠️ This page may combine multiple inventors who share the name “BAO JUNWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TIMBRE TECH INC

23 patents
US6721691B2Apr 13, 2004

Metrology hardware specification using a hardware simulator

TIMBRE TECH INC162 citations99
US7330279B2Feb 12, 2008

Model and parameter selection for optical metrology

TIMBRE TECH INC58 citations98
US6609086B1Aug 19, 2003

Profile refinement for integrated circuit metrology

TIMBRE TECH INC113 citations98
US7280229B2Oct 9, 2007

Examining a structure formed on a semiconductor wafer using machine learning systems

TIMBRE TECH INC51 citations96
US7126700B2Oct 24, 2006

Parametric optimization of optical metrology model

TIMBRE TECH INC59 citations96
US7064829B2Jun 20, 2006

Generic interface for an optical metrology system

TIMBRE TECH INC47 citations96
US6775015B2Aug 10, 2004

Optical metrology of single features

TIMBRE TECH INC42 citations96
US7171284B2Jan 30, 2007

Optical metrology model optimization based on goals

TIMBRE TECH INC49 citations93
US7136796B2Nov 14, 2006

Generation and use of integrated circuit profile-based simulation information

TIMBRE TECH INC32 citations93
US7388677B2Jun 17, 2008

Optical metrology optimization for repetitive structures

TIMBRE TECH INC26 citations92
US6853942B2Feb 8, 2005

Metrology hardware adaptation with universal library

TIMBRE TECH INC20 citations92
US7467064B2Dec 16, 2008

Transforming metrology data from a semiconductor treatment system using multivariate analysis

TIMBRE TECH INC16 citations90
US7216045B2May 8, 2007

Selection of wavelengths for integrated circuit optical metrology

TIMBRE TECH INC22 citations90
US7355728B2Apr 8, 2008

Optical metrology model optimization for repetitive structures

TIMBRE TECH INC20 citations89
US7474420B2Jan 6, 2009

In-die optical metrology

TIMBRE TECH INC11 citations84
US7450232B2Nov 11, 2008

Generic interface for an optical metrology system

TIMBRE TECH INC9 citations84
US7302367B2Nov 27, 2007

Library accuracy enhancement and evaluation

TIMBRE TECH INC14 citations84
US7030999B2Apr 18, 2006

Optical metrology of single features

TIMBRE TECH INC11 citations84
US6842261B2Jan 11, 2005

Integrated circuit profile value determination

TIMBRE TECH INC14 citations84
US7394554B2Jul 1, 2008

Selecting a hypothetical profile to use in optical metrology

TIMBRE TECH INC10 citations82
US7505153B2Mar 17, 2009

Model and parameter selection for optical metrology

TIMBRE TECH INC5 citations74
US7379192B2May 27, 2008

Optical metrology of single features

TIMBRE TECH INC6 citations74
US7271902B2Sep 18, 2007

Generic interface for an optical metrology system

TIMBRE TECH INC9 citations74

TOKYO ELECTRON LTD

12 patents
US7831528B2Nov 9, 2010

Optical metrology of structures formed on semiconductor wafers using machine learning systems

TOKYO ELECTRON LTD29 citations92
US7372583B1May 13, 2008

Controlling a fabrication tool using support vector machine

TOKYO ELECTRON LTD22 citations92
US7588949B2Sep 15, 2009

Optical metrology model optimization based on goals

TOKYO ELECTRON LTD11 citations84
US7580823B2Aug 25, 2009

Generation and use of integrated circuit profile-based simulation information

TOKYO ELECTRON LTD9 citations84
US7567352B2Jul 28, 2009

Controlling a fabrication tool using support vector machine

TOKYO ELECTRON LTD10 citations84
US7526354B2Apr 28, 2009

Managing and using metrology data for process and equipment control

TOKYO ELECTRON LTD10 citations84
US7523076B2Apr 21, 2009

Selecting a profile model for use in optical metrology using a machine learning system

TOKYO ELECTRON LTD13 citations84
US7417750B2Aug 26, 2008

Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer

TOKYO ELECTRON LTD11 citations84
US7783669B2Aug 24, 2010

Data flow management in generating profile models used in optical metrology

TOKYO ELECTRON LTD11 citations82
US7667858B2Feb 23, 2010

Automated process control using optical metrology and a correlation between profile models and key profile shape variables

TOKYO ELECTRON LTD9 citations82
US7518740B2Apr 14, 2009

Evaluating a profile model to characterize a structure to be examined using optical metrology

TOKYO ELECTRON LTD9 citations82
US7617075B2Nov 10, 2009

Library accuracy enhancment and evaluation

TOKYO ELECTRON LTD7 citations74

INNOVUSION IRELAND LTD

11 patents

ADVANCED MICRO DEVICES INC

1 patent

JIN WEN

1 patent

VUONG VI

1 patent

INNOVUSION INC

1 patent

Showing the top 50 of 130 patents by PatentIndex Score.