P

Inventor

POVOLNY HENRY S

US11 patents
⚠️ This page may combine multiple inventors who share the name “POVOLNY HENRY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

6 patents
US10102321B2Oct 16, 2018

System, method and apparatus for refining radio frequency transmission system models

LAM RES CORP52 citations93
US9455126B2Sep 27, 2016

Arrangement for plasma processing system control based on RF voltage

LAM RES CORP12 citations83
US9911577B2Mar 6, 2018

Arrangement for plasma processing system control based on RF voltage

LAM RES CORP2 citations72
US10090211B2Oct 2, 2018

Edge seal for lower electrode assembly

LAM RES CORP2 citations71
US10892197B2Jan 12, 2021

Edge seal configurations for a lower electrode assembly

LAM RES CORP1 citations61
US9128473B2Sep 8, 2015

Arrangement for plasma processing system control based on RF voltage

LAM RES CORP2 citations61

UNIV TOLEDO

2 patents
US6638839B2Oct 28, 2003

Hot-filament chemical vapor deposition chamber and process with multiple gas inlets

UNIV TOLEDO532 citations98
US6755151B2Jun 29, 2004

Hot-filament chemical vapor deposition chamber and process with multiple gas inlets

UNIV TOLEDO5 citations72

POVOLNY HENRY S

2 patents
US8454027B2Jun 4, 2013

Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ring

POVOLNY HENRY S11 citations81
US8832916B2Sep 16, 2014

Methods of dechucking and system thereof

POVOLNY HENRY S3 citations59

VALCORE JR JOHN C

1 patent
US8501631B2Aug 6, 2013

Plasma processing system control based on RF voltage

VALCORE JR JOHN C31 citations92