Inventor

TUNG KUEI-CHANG

TW2 patents

⚠️ This page may combine multiple inventors who share the name “TUNG KUEI-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSAI HSIN-TING

1 patent

US8707974B2Apr 29, 2014

Wafer cleaning device

TSAI HSIN-TING4 citations65

UNITED MICROELECTRONICS CORP

1 patent

US9539621B2Jan 10, 2017

Wafer cleaning device and method thereof

UNITED MICROELECTRONICS CORP0 citations46