Inventor
SADJADI REZA
US19 patents
⚠️ This page may combine multiple inventors who share the name “SADJADI REZA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS7708859B2May 4, 2010
Gas distribution system having fast gas switching capabilities
LAM RES CORP268 citations98
US7294580B2Nov 13, 2007
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition
LAM RES CORP29 citations92
US6518174B2Feb 11, 2003
Combined resist strip and barrier etch process for dual damascene structures
LAM RES CORP23 citations92
US7455748B2Nov 25, 2008
Magnetic enhancement for mechanical confinement of plasma
LAM RES CORP9 citations84
US7192531B1Mar 20, 2007
In-situ plug fill
LAM RES CORP14 citations84
US7169695B2Jan 30, 2007
Method for forming a dual damascene structure
LAM RES CORP16 citations84
US6780569B1Aug 24, 2004
Post-development treatment of patterned photoresist to promote cross-linking of polymer chains
LAM RES CORP13 citations83
US7632375B2Dec 15, 2009
Electrically enhancing the confinement of plasma
LAM RES CORP11 citations82
US7838086B2Nov 23, 2010
Magnetic enhancement for mechanical confinement of plasma
LAM RES CORP3 citations63
US7452660B1Nov 18, 2008
Method for resist strip in presence of low K dielectric material and apparatus for performing the same
LAM RES CORP2 citations62
US7288488B2Oct 30, 2007
Method for resist strip in presence of regular low k and/or porous low k dielectric materials
LAM RES CORP3 citations62
US6979579B1Dec 27, 2005
Methods and apparatus for inspecting contact openings in a plasma processing system
LAM RES CORP6 citations61
APPLIED MATERIALS INC
4 patentsUS9805965B2Oct 31, 2017
Pixelated capacitance controlled ESC
APPLIED MATERIALS INC54 citations96
US9646843B2May 9, 2017
Tunable magnetic field to improve uniformity
APPLIED MATERIALS INC6 citations84
US9536769B1Jan 3, 2017
Pixelated capacitance controlled ESC
APPLIED MATERIALS INC11 citations82
US10811233B2Oct 20, 2020
Process chamber having tunable showerhead and tunable liner
APPLIED MATERIALS INC0 citations51