Inventor
BRIGHAM MICHAEL T
US11 patents
⚠️ This page may combine multiple inventors who share the name “BRIGHAM MICHAEL T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS11167980B2Nov 9, 2021
Micro-electro-mechanical system (MEMS) structures and design structures
IBM0 citations62
US10589992B2Mar 17, 2020
Micro-electro-mechanical system (MEMS) structures and design structures
IBM0 citations51
US10589991B2Mar 17, 2020
Micro-electro-mechanical system (MEMS) structures and design structures
IBM0 citations51
US10549987B2Feb 4, 2020
Micro-electro-mechanical system (MEMS) structures and design structures
IBM0 citations51
US9981842B2May 29, 2018
Micro-Electro-Mechanical System (MEMS) structures and design structures
IBM0 citations51
US9969613B2May 15, 2018
Method for forming micro-electro-mechanical system (MEMS) beam structure
IBM0 citations51
US9938137B2Apr 10, 2018
Micro-electro-mechanical system (MEMS) structures and design structures
IBM0 citations51
US9932222B2Apr 3, 2018
Micro-electro-mechanical system (MEMS) structures and design structures
IBM0 citations51