Inventor
ISHIKAWA MICHIO
JP44 patents
⚠️ This page may combine multiple inventors who share the name “ISHIKAWA MICHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC CORP
9 patentsUS5288329AFeb 22, 1994
Chemical vapor deposition apparatus of in-line type
ULVAC CORP52 citations92
US5250339AOct 5, 1993
Magnetic recording medium
ULVAC CORP30 citations92
US4832810AMay 23, 1989
Co-based alloy sputter target and process of manufacturing the same
ULVAC CORP31 citations92
US4804590AFeb 14, 1989
Abrasion resistant magnetic recording member
ULVAC CORP34 citations92
US5554418ASep 10, 1996
Method of forming passivation film
ULVAC CORP41 citations91
US5147734ASep 15, 1992
Magnetic recording media manufactured by a process in which a negative bias voltage is applied to the substrate during sputtering
ULVAC CORP8 citations74
US5069983ADec 3, 1991
Magnetic recording member
ULVAC CORP10 citations72
US5840374ANov 24, 1998
Method of forming a SiO2 passivation film on a plastic substrate
ULVAC CORP3 citations61
US5198309AMar 30, 1993
Magnetic recording member
ULVAC CORP1 citations52
KIMMON ELECTRIC CO LTD
5 patentsUS4420835ADec 13, 1983
Hollow cathode laser
KIMMON ELECTRIC CO LTD7 citations71
US4232274ANov 4, 1980
Metal vapor laser system
KIMMON ELECTRIC CO LTD12 citations71
US4635272AJan 6, 1987
Laser discharge tube
KIMMON ELECTRIC CO LTD16 citations68
US4257014AMar 17, 1981
Gas laser discharge tube using corrugated cathode
KIMMON ELECTRIC CO LTD14 citations68
US4103253AJul 25, 1978
Metal vapor laser generating apparatus
KIMMON ELECTRIC CO LTD3 citations54
ULVAC INC
4 patentsUS7828900B2Nov 9, 2010
Vacuum film-forming apparatus
ULVAC INC17 citations91
US7763115B2Jul 27, 2010
Vacuum film-forming apparatus
ULVAC INC34 citations91
US8367542B2Feb 5, 2013
Semiconductor device manufacturing method and semiconductor device manufacturing apparatus
ULVAC INC6 citations81
US8043963B2Oct 25, 2011
Semiconductor device manufacturing method and semiconductor device manufacturing apparatus
ULVAC INC0 citations49
BROTHER IND LTD
3 patentsHATANAKA MASANOBU
3 patentsUS8252113B2Aug 28, 2012
Method for producing component for vacuum apparatus, resin coating forming apparatus and vacuum film forming system
HATANAKA MASANOBU6 citations71
US8419854B2Apr 16, 2013
Film-forming apparatus
HATANAKA MASANOBU5 citations69
US8084368B2Dec 27, 2011
Method of forming barrier film
HATANAKA MASANOBU5 citations58
SAMSUNG ELECTRONICS CO LTD
3 patentsUS10718053B2Jul 21, 2020
Wafer loading apparatus and film forming apparatus
SAMSUNG ELECTRONICS CO LTD2 citations69
US11728198B2Aug 15, 2023
Electrostatic chuck and wafer etching device including the same
SAMSUNG ELECTRONICS CO LTD1 citations62
US11309203B2Apr 19, 2022
Wafer stage and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations55