P

Inventor

WANG CHIEN-WEI

TW54 patents
⚠️ This page may combine multiple inventors who share the name “WANG CHIEN-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

28 patents
US10658184B2May 19, 2020

Pattern fidelity enhancement with directional patterning technology

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10515812B1Dec 24, 2019

Methods of reducing pattern roughness in semiconductor fabrication

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US9921480B2Mar 20, 2018

Extreme ultraviolet photoresist

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US11422465B2Aug 23, 2022

Extreme ultraviolet photoresist with high-efficiency electron transfer

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11106138B2Aug 31, 2021

Lithography process and material for negative tone development

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10520813B2Dec 31, 2019

Extreme ultraviolet photoresist with high-efficiency electron transfer

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10503070B2Dec 10, 2019

Photosensitive material and method of lithography

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10468249B2Nov 5, 2019

Patterning process of a semiconductor structure with a middle layer

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10163632B2Dec 25, 2018

Material composition and process for substrate modification

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9983474B2May 29, 2018

Photoresist having sensitizer bonded to acid generator

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9958779B2May 1, 2018

Photoresist additive for outgassing reduction and out-of-band radiation absorption

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11442364B2Sep 13, 2022

Materials and methods for forming resist bottom layer

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10394126B2Aug 27, 2019

Photolithography process and materials

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9864275B2Jan 9, 2018

Lithographic resist with floating protectant

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations68
US11062905B2Jul 13, 2021

Patterning process of a semiconductor structure with a middle layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12189296B2Jan 7, 2025

Lithography process and material for negative tone development

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12019375B2Jun 25, 2024

Photosensitive material and method of lithography

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11809080B2Nov 7, 2023

Extreme ultraviolet photoresist with high-efficiency electron transfer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11320738B2May 3, 2022

Pattern formation method and material for manufacturing semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11158509B2Oct 26, 2021

Pattern fidelity enhancement with directional patterning technology

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11003076B2May 11, 2021

Extreme ultraviolet photoresist and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11703766B2Jul 18, 2023

Materials and methods for forming resist bottom layer

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10872773B2Dec 22, 2020

Methods of reducing pattern roughness in semiconductor fabrication

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10802402B2Oct 13, 2020

Material composition and process for substrate modification

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10401728B2Sep 3, 2019

Extreme ultraviolet photoresist and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10048590B2Aug 14, 2018

Method and apparatus of patterning a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10042252B2Aug 7, 2018

Extreme ultraviolet photoresist and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10312108B2Jun 4, 2019

Method for forming semiconductor structure using modified resist layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51

WANG CHIEN-WEI

11 patents

TAIWAN SEMICONDUCTOR MFG

4 patents

VANGUARD INT SEMICONDUCT CORP

3 patents

EXPERIAN INFORMATION SOLUTIONS

1 patent

EXPERIAN INF SOLUTIONS INC

1 patent

CHEN CHUN-KUANG

1 patent

CORETRONIC CORP

1 patent

Showing the top 50 of 54 patents by PatentIndex Score.