Inventor
WANG CHIEN-WEI
TW54 patents
⚠️ This page may combine multiple inventors who share the name “WANG CHIEN-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
28 patentsUS10658184B2May 19, 2020
Pattern fidelity enhancement with directional patterning technology
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10515812B1Dec 24, 2019
Methods of reducing pattern roughness in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US9921480B2Mar 20, 2018
Extreme ultraviolet photoresist
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US11422465B2Aug 23, 2022
Extreme ultraviolet photoresist with high-efficiency electron transfer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11106138B2Aug 31, 2021
Lithography process and material for negative tone development
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10520813B2Dec 31, 2019
Extreme ultraviolet photoresist with high-efficiency electron transfer
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10503070B2Dec 10, 2019
Photosensitive material and method of lithography
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10468249B2Nov 5, 2019
Patterning process of a semiconductor structure with a middle layer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10163632B2Dec 25, 2018
Material composition and process for substrate modification
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9983474B2May 29, 2018
Photoresist having sensitizer bonded to acid generator
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9958779B2May 1, 2018
Photoresist additive for outgassing reduction and out-of-band radiation absorption
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11442364B2Sep 13, 2022
Materials and methods for forming resist bottom layer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10394126B2Aug 27, 2019
Photolithography process and materials
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9864275B2Jan 9, 2018
Lithographic resist with floating protectant
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations68
US11062905B2Jul 13, 2021
Patterning process of a semiconductor structure with a middle layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12189296B2Jan 7, 2025
Lithography process and material for negative tone development
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12019375B2Jun 25, 2024
Photosensitive material and method of lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11809080B2Nov 7, 2023
Extreme ultraviolet photoresist with high-efficiency electron transfer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11320738B2May 3, 2022
Pattern formation method and material for manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11158509B2Oct 26, 2021
Pattern fidelity enhancement with directional patterning technology
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11003076B2May 11, 2021
Extreme ultraviolet photoresist and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11703766B2Jul 18, 2023
Materials and methods for forming resist bottom layer
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10872773B2Dec 22, 2020
Methods of reducing pattern roughness in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10802402B2Oct 13, 2020
Material composition and process for substrate modification
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10401728B2Sep 3, 2019
Extreme ultraviolet photoresist and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10048590B2Aug 14, 2018
Method and apparatus of patterning a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10042252B2Aug 7, 2018
Extreme ultraviolet photoresist and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10312108B2Jun 4, 2019
Method for forming semiconductor structure using modified resist layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
WANG CHIEN-WEI
11 patentsUS8216767B2Jul 10, 2012
Patterning process and chemical amplified photoresist with a photodegradable base
WANG CHIEN-WEI110 citations99
US8658344B2Feb 25, 2014
Patterning process and photoresist with a photodegradable base
WANG CHIEN-WEI93 citations98
US8586290B2Nov 19, 2013
Patterning process and chemical amplified photoresist composition
WANG CHIEN-WEI34 citations92
US8512939B2Aug 20, 2013
Photoresist stripping technique
WANG CHIEN-WEI13 citations84
US8105954B2Jan 31, 2012
System and method of vapor deposition
WANG CHIEN-WEI8 citations83
US8563231B2Oct 22, 2013
Patterning process and materials for lithography
WANG CHIEN-WEI10 citations81
US9046785B2Jun 2, 2015
Method and apparatus of patterning a semiconductor device
WANG CHIEN-WEI2 citations63
US9029062B2May 12, 2015
Photoresist and patterning process
WANG CHIEN-WEI2 citations61
US8956806B2Feb 17, 2015
Photoresist and patterning process
WANG CHIEN-WEI1 citations52
US8822347B2Sep 2, 2014
Wet soluble lithography
WANG CHIEN-WEI0 citations52
US8304179B2Nov 6, 2012
Method for manufacturing a semiconductor device using a modified photosensitive layer
WANG CHIEN-WEI0 citations52
TAIWAN SEMICONDUCTOR MFG
4 patentsUS8841066B2Sep 23, 2014
Photoresist stripping technique
TAIWAN SEMICONDUCTOR MFG5 citations73
US7142938B2Nov 28, 2006
Manufacturing management system and method
TAIWAN SEMICONDUCTOR MFG9 citations65
US9389510B2Jul 12, 2016
Patterning process and chemical amplified photoresist composition
TAIWAN SEMICONDUCTOR MFG0 citations52
US9323155B2Apr 26, 2016
Double patterning strategy for contact hole and trench in photolithography
TAIWAN SEMICONDUCTOR MFG1 citations51
VANGUARD INT SEMICONDUCT CORP
3 patentsEXPERIAN INFORMATION SOLUTIONS
1 patentEXPERIAN INF SOLUTIONS INC
1 patentCHEN CHUN-KUANG
1 patentCORETRONIC CORP
1 patentShowing the top 50 of 54 patents by PatentIndex Score.