Inventor
MELI THOMPSON LUCIANA
US9 patents
Patents
9 patentsUS10879107B2Dec 29, 2020
Method of forming barrier free contact for metal interconnects
IBM14 citations84
US10274836B2Apr 30, 2019
Determination of lithography effective dose uniformity
IBM3 citations71
US11681213B2Jun 20, 2023
EUV pattern transfer using graded hardmask
IBM0 citations62
US11300881B2Apr 12, 2022
Line break repairing layer for extreme ultraviolet patterning stacks
IBM0 citations62
US10615037B2Apr 7, 2020
Tone reversal during EUV pattern transfer using surface active layer assisted selective deposition
IBM1 citations62
US10281826B2May 7, 2019
Determination of lithography effective dose uniformity
IBM1 citations61
US12362168B2Jul 15, 2025
Solvent annealing of an organic planarization layer
IBM0 citations55
US10539884B2Jan 21, 2020
Post-lithography defect inspection using an e-beam inspection tool
IBM0 citations51
US10578981B2Mar 3, 2020
Post-lithography defect inspection using an e-beam inspection tool
IBM0 citations50