Inventor
FALLON JOHN P
US8 patents
⚠️ This page may combine multiple inventors who share the name “FALLON JOHN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
5 patentsUS6690704B2Feb 10, 2004
Control system for a two chamber gas discharge laser
CYMER INC128 citations98
US7079564B2Jul 18, 2006
Control system for a two chamber gas discharge laser
CYMER INC26 citations92
US7039086B2May 2, 2006
Control system for a two chamber gas discharge laser
CYMER INC32 citations92
USRE42588EAug 2, 2011
Control system for a two chamber gas discharge laser system
CYMER INC5 citations62
US7596164B2Sep 29, 2009
Control system for a two chamber gas discharge laser
CYMER INC5 citations62