Inventor
TERAMOTO AKIHIRO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “TERAMOTO AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS8043039B2Oct 25, 2011
Substrate treatment apparatus
TOKYO ELECTRON LTD10 citations82
US9136150B2Sep 15, 2015
Substrate processing apparatus, substrate processing method and non-transitory storage medium
TOKYO ELECTRON LTD6 citations71
US10879100B2Dec 29, 2020
Substrate transfer device, substrate transfer method and recording medium
TOKYO ELECTRON LTD4 citations69
USD922609SJun 15, 2021
Holding pad for substrate transfer
TOKYO ELECTRON LTD3 citations67
USD909603SFeb 2, 2021
Holding pad for substrate transfer
TOKYO ELECTRON LTD2 citations67
US12444623B2Oct 14, 2025
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations56
US12174549B2Dec 24, 2024
Liquid amount measuring method and computer-readable recording medium
TOKYO ELECTRON LTD0 citations56
US11726409B2Aug 15, 2023
Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig
TOKYO ELECTRON LTD0 citations56
US11211278B2Dec 28, 2021
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations51
US9268327B2Feb 23, 2016
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD1 citations51
US11868057B2Jan 9, 2024
Solution treatment apparatus and cleaning method
TOKYO ELECTRON LTD0 citations49
US12525906B2Jan 13, 2026
Motor control method, transfer device, and storing medium
TOKYO ELECTRON LTD0 citations47
US11476143B2Oct 18, 2022
Substrate processing apparatus and substrate receptacle storage method
TOKYO ELECTRON LTD0 citations47
US9214370B2Dec 15, 2015
Substrate transfer device, substrate transfer method, and storage medium
TOKYO ELECTRON LTD0 citations41