Inventor
WU SHANG-YING
TW11 patents
Patents
11 patentsUS10656539B2May 19, 2020
Radiation source for lithography process
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10718718B2Jul 21, 2020
EUV vessel inspection method and related system
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10875060B2Dec 29, 2020
Method and apparatus for removing debris from collector
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations82
US11832372B2Nov 28, 2023
EUV light source and apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11275318B2Mar 15, 2022
Radiation source for lithography process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11272606B2Mar 8, 2022
EUV light source and apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10928741B2Feb 23, 2021
Radiation source for lithography process
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10429314B2Oct 1, 2019
EUV vessel inspection method and related system
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12167525B2Dec 10, 2024
EUV light source and apparatus for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11829082B2Nov 28, 2023
Radiation source for lithography process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11092555B2Aug 17, 2021
EUV vessel inspection method and related system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62