Inventor
OTSUKI KOHEI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “OTSUKI KOHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS11862436B2Jan 2, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations69
US11183371B2Nov 23, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations69
US11566728B2Jan 31, 2023
Flexible pipe and temperature control system
TOKYO ELECTRON LTD0 citations60
US10787950B2Sep 29, 2020
Heat insulating pipe system and processing system
TOKYO ELECTRON LTD0 citations49
US12217943B2Feb 4, 2025
Substrate processing apparatus and electrostatic chuck
TOKYO ELECTRON LTD0 citations48