Inventor
MENK JOHN C
US9 patents
Patents
9 patentsUS11189511B2Nov 30, 2021
Side storage pods, equipment front end modules, and methods for operating EFEMs
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US10192765B2Jan 29, 2019
Substrate processing systems, apparatus, and methods with factory interface environmental controls
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US11373891B2Jun 28, 2022
Front-ducted equipment front end modules, side storage pods, and methods of operating the same
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US11640915B2May 2, 2023
Side storage pods, equipment front end modules, and methods for operating EFEMs
APPLIED MATERIALS INC0 citations61
US12027397B2Jul 2, 2024
Enclosure system shelf including alignment features
APPLIED MATERIALS INC1 citations60
US11610794B2Mar 21, 2023
Side storage pods, equipment front end modules, and methods for operating the same
APPLIED MATERIALS INC0 citations60
US11450539B2Sep 20, 2022
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC0 citations60
US11282724B2Mar 22, 2022
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC0 citations59
US12159795B2Dec 3, 2024
Enclosure system having walls comprising sidewalls and radio-frequency identifier holder coupled to rear wall
APPLIED MATERIALS INC0 citations58