Inventor
RAJARAM SANJAY
US10 patents
⚠️ This page may combine multiple inventors who share the name “RAJARAM SANJAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6939198B1Sep 6, 2005
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC70 citations97
US7294039B2Nov 13, 2007
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC15 citations92
US7101251B2Sep 5, 2006
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC15 citations92
US10192765B2Jan 29, 2019
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC13 citations81
US7927182B2Apr 19, 2011
Polishing system with in-line and in-situ metrology
APPLIED MATERIALS INC6 citations73
US7585202B2Sep 8, 2009
Computer-implemented method for process control in chemical mechanical polishing
APPLIED MATERIALS INC4 citations73
US11450539B2Sep 20, 2022
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC0 citations60
US11282724B2Mar 22, 2022
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC0 citations59
US11728191B2Aug 15, 2023
Front surface and back surface orientation detection of transparent substrate
APPLIED MATERIALS INC0 citations41