Inventor
BAUMGARTEN DOUGLAS B
US12 patents
Patents
12 patentsUS11189511B2Nov 30, 2021
Side storage pods, equipment front end modules, and methods for operating EFEMs
APPLIED MATERIALS INC7 citations83
US10453726B2Oct 22, 2019
Electronic device manufacturing load port apparatus, systems, and methods
APPLIED MATERIALS INC2 citations71
US11842913B2Dec 12, 2023
Seal mechanisms for load ports
APPLIED MATERIALS INC0 citations61
US11640915B2May 2, 2023
Side storage pods, equipment front end modules, and methods for operating EFEMs
APPLIED MATERIALS INC0 citations61
US11276594B2Mar 15, 2022
Systems, apparatus, and methods for an improved load port backplane
APPLIED MATERIALS INC0 citations61
US10541165B2Jan 21, 2020
Systems, apparatus, and methods for an improved load port backplane
APPLIED MATERIALS INC1 citations61
US11610794B2Mar 21, 2023
Side storage pods, equipment front end modules, and methods for operating the same
APPLIED MATERIALS INC0 citations60
US11450539B2Sep 20, 2022
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC0 citations60
US11171029B2Nov 9, 2021
Electronic device manufacturing load port apparatus, systems, and methods
APPLIED MATERIALS INC0 citations60
US12142508B2Nov 12, 2024
Factory interface robots usable with integrated load locks
APPLIED MATERIALS INC0 citations59
US12159802B2Dec 3, 2024
Shortened load port for factory interface
APPLIED MATERIALS INC0 citations47
US11061417B2Jul 13, 2021
Selectable-rate bottom purge apparatus and methods
APPLIED MATERIALS INC0 citations40