Inventor

MERRY NIR

US52 patents

⚠️ This page may combine multiple inventors who share the name “MERRY NIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MERRY NIR

APPLIED MATERIALS INC

Rapid thermal processing chamber with micro-positioning system

High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods

Heated substrate support with temperature profile control

Rapid thermal processing chamber with micro-positioning system

Rapid thermal processing chamber with micro-positioning system

Batch deposition tool and compressed boat

Side storage pods, equipment front end modules, and methods for operating EFEMs

Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal

Batch processing platform for ALD and CVD

Substrate processing systems, apparatus, and methods with factory interface environmental controls

Linked vacuum processing tools and methods of using the same

Load lock door assembly, load lock apparatus, electronic device processing systems, and methods

Dual actuating tilting slit valve

Front-ducted equipment front end modules, side storage pods, and methods of operating the same

Vibration-controlled substrate handling robots, systems, and methods

Semiconductor processing tool platform configuration with reduced footprint

Side storage pods, equipment front end modules, and methods for operating equipment front end modules

Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing

Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing

Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods

Side storage pods, equipment front end modules, and methods for operating EFEMs

Side storage pods, equipment front end modules, and methods for operating the same

Substrate processing systems, apparatus, and methods with factory interface environmental controls

Process chamber apparatus, systems, and methods for controlling a gas flow pattern

Substrate processing systems, apparatus, and methods with factory interface environmental controls

Mass flow control based on micro-electromechanical devices

Process chamber gas flow apparatus, systems, and methods

Micro-electromechanical device for use in a flow control apparatus

Damage isolation by shaped beam delivery in laser scribing process

Fast and continuous eddy-current metrology of a conductive film

GAS RES INST

Fault-tolerant HVAC system

Fault-tolerant HVAC system

Installation link-up procedure

Control methods and apparatus for gas-fired combustors

Indoor environmental conditioning system and method for controlling the circulation of non-conditioned air

Apparatus and method for determining the state of an electrical switch within an HVAC system

MERRY NIR

Vertical wafer buffering system

Use of infrared camera for real-time temperature monitoring and control

Use of infrared camera for real-time temperature monitoring and control

Substrate processing chamber with off-center gas delivery funnel

Substrate processing chamber with off-center gas delivery funnel

CRYO INSTR INC

Apparatus for cryosurgery

HOLDEN JAMES M

Damage isolation by shaped beam delivery in laser scribing process

SORABJI KHURSHED

Rapid thermal processing chamber with micro-positioning system

(unassigned)

Thermally insulating surgical probe

ADERHOLD WOLFGANG

Temperature uniformity measurements during rapid thermal processing

PORTHOUSE KEITH BRIAN

Methods and apparatus for processing substrates using model-based control

NEWMAN JACOB

Multiple substrate transfer robot

FOAD MAJEED A

Modification of magnetic properties of films using ion and neutral beam implantation

APPLIED MATERIALS ISRAEL LTD

Integrated system and method