Inventor
SRIDHAR SHYAM
US12 patents
Patents
12 patentsUS12394600B2Aug 19, 2025
Balanced RF resonant antenna system
TOKYO ELECTRON LTD2 citations73
US10529589B2Jan 7, 2020
Method of plasma etching of silicon-containing organic film using sulfur-based chemistry
TOKYO ELECTRON LTD4 citations70
US12580153B2Mar 17, 2026
Balanced resonator source for plasma processing
TOKYO ELECTRON LTD0 citations62
US12300468B2May 13, 2025
Method of uniformity control
TOKYO ELECTRON LTD0 citations60
US12217935B2Feb 4, 2025
Plasma processing methods using multiphase multifrequency bias pulses
TOKYO ELECTRON LTD0 citations59
US12555756B2Feb 17, 2026
System and method to measure ion properties in a plasma system
TOKYO ELECTRON LTD0 citations58
US11637242B2Apr 25, 2023
Methods for resistive RAM (ReRAM) performance stabilization via dry etch clean treatment
TOKYO ELECTRON LTD0 citations56
US12224160B2Feb 11, 2025
Topographic selective deposition
TOKYO ELECTRON LTD0 citations50
US12009430B2Jun 11, 2024
Method for gate stack formation and etching
TOKYO ELECTRON LTD0 citations50
US11398386B2Jul 26, 2022
Plasma etch processes
TOKYO ELECTRON LTD0 citations48
US10115591B2Oct 30, 2018
Selective SiARC removal
TOKYO ELECTRON LTD0 citations40
US10811269B2Oct 20, 2020
Method to achieve a sidewall etch
TOKYO ELECTRON LTD0 citations39