Inventor
RENKEN WAYNE G
US17 patents
⚠️ This page may combine multiple inventors who share the name “RENKEN WAYNE G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SENSARRAY CORP
5 patentsUS6190040B1Feb 20, 2001
Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool
SENSARRAY CORP132 citations97
US6889568B2May 10, 2005
Process condition sensing wafer and data analysis system
SENSARRAY CORP44 citations95
US7360463B2Apr 22, 2008
Process condition sensing wafer and data analysis system
SENSARRAY CORP16 citations92
US7363195B2Apr 22, 2008
Methods of configuring a sensor network
SENSARRAY CORP14 citations81
US6915589B2Jul 12, 2005
Sensor positioning systems and methods
SENSARRAY CORP16 citations79
INNOVUS
4 patentsUS4690371ASep 1, 1987
Electromagnetic valve with permanent magnet armature
INNOVUS186 citations96
US4542650ASep 24, 1985
Thermal mass flow meter
INNOVUS141 citations95
US4685331AAug 11, 1987
Thermal mass flowmeter and controller
INNOVUS76 citations91
US4647133AMar 3, 1987
Electrical interconnect system
INNOVUS29 citations87
KLA TENCOR CORP
4 patentsUS8046193B2Oct 25, 2011
Determining process condition in substrate processing module
KLA TENCOR CORP473 citations95
US7757574B2Jul 20, 2010
Process condition sensing wafer and data analysis system
KLA TENCOR CORP13 citations84
US7698952B2Apr 20, 2010
Pressure sensing device
KLA TENCOR CORP13 citations81
US7497134B2Mar 3, 2009
Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process
KLA TENCOR CORP10 citations81