Inventor
ABEL JOSEPH R
US14 patents
⚠️ This page may combine multiple inventors who share the name “ABEL JOSEPH R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
13 patentsUS10658172B2May 19, 2020
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
LAM RES CORP7 citations83
US11651963B2May 16, 2023
Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film
LAM RES CORP0 citations62
US12412742B2Sep 9, 2025
Impurity reduction in silicon-containing films
LAM RES CORP1 citations60
US12125705B2Oct 22, 2024
Method for providing doped silicon using a diffusion barrier layer
LAM RES CORP0 citations60
US12020923B2Jun 25, 2024
Low-κ ALD gap-fill methods and material
LAM RES CORP0 citations59
US12473633B2Nov 18, 2025
Plasma enhanced atomic layer deposition of silicon-containing films
LAM RES CORP0 citations58
US12417943B2Sep 16, 2025
Reducing intralevel capacitance in semiconductor devices
LAM RES CORP0 citations58
US12322619B2Jun 3, 2025
Dynamic process control in semiconductor manufacturing
LAM RES CORP0 citations57
US12252782B2Mar 18, 2025
In-situ PECVD cap layer
LAM RES CORP0 citations56
US12288685B2Apr 29, 2025
Modifying hydrophobicity of a wafer surface using an organosilicon precursor
LAM RES CORP0 citations53
US12431349B2Sep 30, 2025
In-situ control of film properties during atomic layer deposition
LAM RES CORP0 citations48
US12087574B2Sep 10, 2024
Oxidative conversion in atomic layer deposition processes
LAM RES CORP0 citations47
US12400880B2Aug 26, 2025
Apparatuses for uniform fluid delivery in a multi-station semiconductor processing chamber
LAM RES CORP0 citations41