Inventor
DOGOME MASAHIRO
JP13 patents
Patents
13 patentsUS11948816B2Apr 2, 2024
Transfer apparatus
TOKYO ELECTRON LTD2 citations71
US11728205B2Aug 15, 2023
Device for transferring substrate, system for processing substrate, and method of processing substrate
TOKYO ELECTRON LTD2 citations70
US12191188B2Jan 7, 2025
Transfer device, transfer system, and end effector
TOKYO ELECTRON LTD1 citations61
US11257707B2Feb 22, 2022
Substrate gripping mechanism, substrate transfer device, and substrate processing system
TOKYO ELECTRON LTD1 citations61
US12476121B2Nov 18, 2025
Transfer apparatus
TOKYO ELECTRON LTD0 citations60
US12198952B2Jan 14, 2025
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US12080572B2Sep 3, 2024
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US11791180B2Oct 17, 2023
Substrate transfer system and load lock module
TOKYO ELECTRON LTD0 citations50
US12588459B2Mar 24, 2026
Gate valve apparatus and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD0 citations49
US11969879B2Apr 30, 2024
Substrate accommodating device and processing system
TOKYO ELECTRON LTD0 citations49
US11972933B2Apr 30, 2024
Plasma processing apparatus and substrate support of plasma processing apparatus
TOKYO ELECTRON LTD0 citations49
US10133266B2Nov 20, 2018
Conveyance robot replacement apparatus and conveyance robot replacement method
TOKYO ELECTRON LTD1 citations48
US9805960B2Oct 31, 2017
Substrate conveyance method
TOKYO ELECTRON LTD1 citations45