Inventor
KITA MASATOMO
JP16 patents
Patents
16 patentsUS11862506B2Jan 2, 2024
Substrate processing system, vacuum substrate transfer module, and substrate transfer method
TOKYO ELECTRON LTD3 citations73
US11948816B2Apr 2, 2024
Transfer apparatus
TOKYO ELECTRON LTD2 citations71
US10643825B2May 5, 2020
Particle generation preventing method and vacuum apparatus
TOKYO ELECTRON LTD5 citations71
US12557585B2Feb 17, 2026
Processing system and transfer method
TOKYO ELECTRON LTD0 citations61
US12341046B2Jun 24, 2025
Transfer apparatus and transfer method
TOKYO ELECTRON LTD0 citations61
US12191188B2Jan 7, 2025
Transfer device, transfer system, and end effector
TOKYO ELECTRON LTD1 citations61
US12125738B2Oct 22, 2024
Storage module, substrate processing system, and method of transferring consumable member
TOKYO ELECTRON LTD0 citations61
US11994234B2May 28, 2024
Gate valve and driving method
TOKYO ELECTRON LTD1 citations61
US11955356B2Apr 9, 2024
Processing system and transfer method
TOKYO ELECTRON LTD0 citations61
US12476121B2Nov 18, 2025
Transfer apparatus
TOKYO ELECTRON LTD0 citations60
US12285786B2Apr 29, 2025
Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method
TOKYO ELECTRON LTD0 citations50
US12198952B2Jan 14, 2025
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US12165893B2Dec 10, 2024
Substrate processing system and transfer method
TOKYO ELECTRON LTD0 citations50
US12131937B2Oct 29, 2024
Transfer system, transfer device, and transfer method
TOKYO ELECTRON LTD0 citations50
US12080572B2Sep 3, 2024
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US11791180B2Oct 17, 2023
Substrate transfer system and load lock module
TOKYO ELECTRON LTD0 citations50