Inventor
GOTO SUSUMU
JP17 patents
⚠️ This page may combine multiple inventors who share the name “GOTO SUSUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
9 patentsUS5864142AJan 26, 1999
Electron beam exposure apparatus and method of controlling same
CANON KK108 citations98
US5929454AJul 27, 1999
Position detection apparatus, electron beam exposure apparatus, and methods associated with them
CANON KK71 citations96
US4785187ANov 15, 1988
Alignment device
CANON KK25 citations92
US4812662AMar 14, 1989
Alignment system using an electron beam
CANON KK24 citations88
US6452193B1Sep 17, 2002
Electron beam exposure apparatus, electron lens, and device manufacturing method
CANON KK8 citations73
US7960703B2Jun 14, 2011
Charged-particle beam lithography apparatus and device manufacturing method
CANON KK2 citations62
US7034314B2Apr 25, 2006
Projection apparatus for projecting a pattern formed on a mask onto a substrate and a control method for a projection apparatus
CANON KK6 citations62
US6831260B2Dec 14, 2004
Electron beam exposure apparatus, reduction projection system, and device manufacturing method
CANON KK4 citations62
US6246065B1Jun 12, 2001
Electron beam projection exposure apparatus
CANON KK5 citations62