Inventor

SHEN WEI-CHENG

TW18 patents

⚠️ This page may combine multiple inventors who share the name “SHEN WEI-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHEN WEI-CHENG

TAIWAN SEMICONDUCTOR MFG CO LTD

Biosensing well array with protective layer

Semiconductor sensing structure and manufacturing method thereof

Semiconductor structure including scribe line structures and method for fabricating the same

Semiconductor structure and manufacturing method thereof

MEMS transducer and method for manufacturing the same

Semiconductor structure including scribe line structures and method for fabricating the same

Semiconductor structure and method for forming the same

Manufacturing method of semiconductor structure

Manufacturing method of semiconductor structure

MEMS device and method for making the same

Semiconductor structure and method for fabricating the same

Scalable biochip and method for making

Isolation structure for MEMS 3D IC integration

MEMS transducer and method for manufacturing the same

Capacitor with planarized bonding for CMOS-MEMS integration

VHF etch barrier for semiconductor integrated microsystem

TAIWAN SEMICONDUCTOR MFG

Biosensing well array with protective layer

Biosensing well array by self-alignment and selective etching