Inventor

MALEEV IVAN

US22 patents

⚠️ This page may combine multiple inventors who share the name “MALEEV IVAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MALEEV IVAN

TOKYO ELECTRON LTD

Broom camera and rotational stage for metrology measurements

Optical sensor for remote temperature measurements

Apparatus and method for monitoring and measuring properties of polymers in solutions

Method and apparatus for inspecting pattern collapse defects

Method and apparatus for inspecting pattern collapse defects

Optical sensor for phase determination

Fiber bundle based optical spot size selector

Raman sensor for supercritical fluids metrology

Optical sensors for measuring properties of consumable parts in a semiconductor plasma processing chamber

KLA TENCOR CORP

TDI sensor in a darkfield system

System, method and apparatus for polarization control

Wafer edge detection and inspection

Wafer inspection

System, method and apparatus for polarization control

Wafer inspection

Multi-spot illumination for improved detection sensitivity

Optical surface scanning systems and methods

MALEEV IVAN

Transmissive-reflective photocathode

Angular resolved spectroscopic scatterometer

GOOGLE LLC

Systems and methods for biomechanically-based eye signals for interacting with real and virtual objects

ROMANOVSKY ANATOLY

Wafer inspection

KLA CORP

System, method and apparatus for polarization control