Inventor
HARADA KATSUHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “HARADA KATSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON TELEGRAPH & TELEPHONE
5 patentsUS5208629AMay 4, 1993
Optical projection exposure method and system using the same
NIPPON TELEGRAPH & TELEPHONE54 citations92
US4699870AOct 13, 1987
Patterning method
NIPPON TELEGRAPH & TELEPHONE21 citations79
US4634645AJan 6, 1987
Method of forming resist micropattern
NIPPON TELEGRAPH & TELEPHONE18 citations72
US4430419AFeb 7, 1984
Positive resist and method for manufacturing a pattern thereof
NIPPON TELEGRAPH & TELEPHONE18 citations71
US4820609AApr 11, 1989
Highly sensitive positive resist mixture
NIPPON TELEGRAPH & TELEPHONE3 citations59