Inventor
TOGUCHI MANABU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TOGUCHI MANABU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
8 patentsUS6204912B1Mar 20, 2001
Exposure method, exposure apparatus, and mask
NIKON CORP90 citations97
US5912726AJun 15, 1999
Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system
NIKON CORP47 citations92
US7864293B2Jan 4, 2011
Exposure apparatus, exposure method, and producing method of microdevice
NIKON CORP10 citations84
US5859690AJan 12, 1999
Method of dividing and exposing patterns
NIKON CORP17 citations82
US6506544B1Jan 14, 2003
Exposure method and exposure apparatus and mask
NIKON CORP11 citations71
US5532822AJul 2, 1996
Method of measuring orthogonality of stage unit
NIKON CORP17 citations68
US6873400B2Mar 29, 2005
Scanning exposure method and system
NIKON CORP4 citations61
US6538724B1Mar 25, 2003
Exposure apparatus
NIKON CORP0 citations50