Inventor
YEN HAW
TW7 patents
⚠️ This page may combine multiple inventors who share the name “YEN HAW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VANGUARD INT SEMICONDUCT CORP
6 patentsUS5583070ADec 10, 1996
Process to form rugged polycrystalline silicon surfaces
VANGUARD INT SEMICONDUCT CORP35 citations92
US5705442AJan 6, 1998
Optimized tungsten contact plug process via use of furnace annealed barrier layers
VANGUARD INT SEMICONDUCT CORP35 citations91
US5591672AJan 7, 1997
Annealing of titanium - titanium nitride in contact hole
VANGUARD INT SEMICONDUCT CORP38 citations91
US5552340ASep 3, 1996
Nitridation of titanium, for use with tungsten filled contact holes
VANGUARD INT SEMICONDUCT CORP33 citations91
US5510296AApr 23, 1996
Manufacturable process for tungsten polycide contacts using amorphous silicon
VANGUARD INT SEMICONDUCT CORP24 citations88
US5838051ANov 17, 1998
Tungsten policide contacts for semiconductor devices
VANGUARD INT SEMICONDUCT CORP10 citations69