Inventor

FUNASHO HIROYUKI

JP3 patents

Patents

3 patents

US5370463ADec 6, 1994

Hydrodynamic gas bearing

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD29 citations90

US5273368ADec 28, 1993

Hydrodynamic gas bearing

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD24 citations90

US5735028AApr 7, 1998

Processing apparatus with movable processing tool and processing method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations71