Inventor
MONTAGUE STEPHEN
US9 patents
Patents
9 patentsUS5963788AOct 5, 1999
Method for integrating microelectromechanical devices with electronic circuitry
SANDIA CORP310 citations98
US5798283AAug 25, 1998
Method for integrating microelectromechanical devices with electronic circuitry
SANDIA CORP209 citations98
US6537437B1Mar 25, 2003
Surface-micromachined microfluidic devices
SANDIA CORP143 citations97
US5919548AJul 6, 1999
Chemical-mechanical polishing of recessed microelectromechanical devices
SANDIA CORP269 citations97
US6615496B1Sep 9, 2003
Micromachined cutting blade formed from {211}-oriented silicon
SANDIA CORP52 citations96
US5783340AJul 21, 1998
Method for photolithographic definition of recessed features on a semiconductor wafer utilizing auto-focusing alignment
SANDIA CORP118 citations96
US9653230B1May 16, 2017
Push plate, mounting assembly, circuit board, and method of assembling thereof for ball grid array packages
SANDIA CORP6 citations72
US6797187B1Sep 28, 2004
Surface-micromachined microfluidic devices
SANDIA CORP9 citations72
US7992309B2Aug 9, 2011
Micromachined cutting blade formed from {211}-oriented silicon
SANDIA CORP4 citations62