Inventor
MCWHORTER PAUL J
US9 patents
⚠️ This page may combine multiple inventors who share the name “MCWHORTER PAUL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SANDIA CORP
4 patentsUS5798283AAug 25, 1998
Method for integrating microelectromechanical devices with electronic circuitry
SANDIA CORP209 citations98
US5783340AJul 21, 1998
Method for photolithographic definition of recessed features on a semiconductor wafer utilizing auto-focusing alignment
SANDIA CORP118 citations96
US6082208AJul 4, 2000
Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed
SANDIA CORP74 citations95
US5804084ASep 8, 1998
Use of chemical mechanical polishing in micromachining
SANDIA CORP125 citations95
BECTON DICKINSON CO
4 patentsUS7364564B2Apr 29, 2008
Implant having MEMS flow module with movable, flow-controlling baffle
BECTON DICKINSON CO51 citations92
US7544176B2Jun 9, 2009
Glaucoma implant having MEMS flow module with flexing diaphragm for pressure regulation
BECTON DICKINSON CO18 citations84
US7384550B2Jun 10, 2008
Glaucoma implant having MEMS filter module
BECTON DICKINSON CO16 citations84
US7226540B2Jun 5, 2007
MEMS filter module
BECTON DICKINSON CO12 citations84