Inventor
URAGUCHI MASAHIRO
JP5 patents
Patents
5 patentsUS5876884AMar 2, 1999
Method of fabricating a flat-panel display device and an apparatus therefore
FUJITSU LTD36 citations88
US6528425B1Mar 4, 2003
Method and apparatus for processing substrate surface with striped ridge patterns
FUJITSU LTD9 citations69
US6465137B2Oct 15, 2002
Resist composition and pattern forming process
FUJITSU LTD5 citations62
US5652938AJul 29, 1997
Method and apparatus for developing resist
FUJITSU LTD2 citations58
US5571644ANov 5, 1996
Method and apparatus for developing resist
FUJITSU LTD5 citations58