Inventor
NISHIKAWA KAZUYASU
JP21 patents
⚠️ This page may combine multiple inventors who share the name “NISHIKAWA KAZUYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
14 patentsUS6244211B1Jun 12, 2001
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP193 citations98
US6076483AJun 20, 2000
Plasma processing apparatus using a partition panel
MITSUBISHI ELECTRIC CORP82 citations96
US6417111B2Jul 9, 2002
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP30 citations92
US6167835B1Jan 2, 2001
Two chamber plasma processing apparatus
MITSUBISHI ELECTRIC CORP43 citations92
US6020570AFeb 1, 2000
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP23 citations92
US6273954B2Aug 14, 2001
System for manufacturing a semiconductor device
MITSUBISHI ELECTRIC CORP44 citations90
US7064411B2Jun 20, 2006
Spiral inductor and transformer
MITSUBISHI ELECTRIC CORP17 citations83
US6335595B1Jan 1, 2002
Plasma generating apparatus
MITSUBISHI ELECTRIC CORP10 citations72
US7551116B2Jun 23, 2009
Semiconductor integrated circuit performing a voltage comparison and preventing deterioration of a voltage comparison accuracy
MITSUBISHI ELECTRIC CORP7 citations71
US10418295B2Sep 17, 2019
Power module
MITSUBISHI ELECTRIC CORP3 citations69
US8816493B2Aug 26, 2014
Semiconductor device
MITSUBISHI ELECTRIC CORP2 citations61
US9508564B2Nov 29, 2016
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations51
US9502954B2Nov 22, 2016
Signal transmission circuit and power conversion device equipped with same
MITSUBISHI ELECTRIC CORP1 citations50
US10181445B2Jan 15, 2019
Power module
MITSUBISHI ELECTRIC CORP0 citations40