Inventor
TURNER CHARLES L
US11 patents
⚠️ This page may combine multiple inventors who share the name “TURNER CHARLES L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
9 patentsUS5917213AJun 29, 1999
Depletion compensated polysilicon electrodes
MICRON TECHNOLOGY INC34 citations96
US5792700AAug 11, 1998
Semiconductor processing method for providing large grain polysilicon films
MICRON TECHNOLOGY INC39 citations92
US5491107AFeb 13, 1996
Semiconductor processing method for providing large grain polysilicon films
MICRON TECHNOLOGY INC19 citations92
US5332689AJul 26, 1994
Method for depositing low bulk resistivity doped films
MICRON TECHNOLOGY INC47 citations92
US6048781AApr 11, 2000
Semiconductor processing method for providing large grain polysilicon films
MICRON TECHNOLOGY INC16 citations83
US6506645B2Jan 14, 2003
Depletion compensated polysilicon electrodes
MICRON TECHNOLOGY INC6 citations73
US6333536B1Dec 25, 2001
Depletion compensated polysilicon electrodes
MICRON TECHNOLOGY INC1 citations62
US6180449B1Jan 30, 2001
Depletion compensated polysilicon electrodes
MICRON TECHNOLOGY INC3 citations62
US5409539AApr 25, 1995
Slotted cantilever diffusion tube system with a temperature insulating baffle system and a distributed gas injector system
MICRON TECHNOLOGY INC6 citations54