Inventor
CHENG YI-FANG
TW7 patents
Patents
7 patentsUS6638830B1Oct 28, 2003
Method for fabricating a high-density capacitor
UNITED MICROELECTRONICS CORP32 citations92
US6593185B1Jul 15, 2003
Method of forming embedded capacitor structure applied to logic integrated circuit
UNITED MICROELECTRONICS CORP45 citations92
US6440861B1Aug 27, 2002
Method of forming dual damascene structure
UNITED MICROELECTRONICS CORP21 citations92
US6350681B1Feb 26, 2002
Method of forming dual damascene structure
UNITED MICROELECTRONICS CORP9 citations72
US7199059B2Apr 3, 2007
Method for removing polymer as etching residue
UNITED MICROELECTRONICS CORP8 citations68
US6521545B1Feb 18, 2003
Method of a surface treatment on a fluorinated silicate glass film
UNITED MICROELECTRONICS CORP5 citations58
US7514365B2Apr 7, 2009
Method of fabricating opening and plug
UNITED MICROELECTRONICS CORP2 citations52