P

Inventor

HOFMEISTER CHRISTOPHER A

US24 patents
⚠️ This page may combine multiple inventors who share the name “HOFMEISTER CHRISTOPHER A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BROOKS AUTOMATION INC

19 patents
US6002840ADec 14, 1999

Substrate transport apparatus

BROOKS AUTOMATION INC144 citations99
US6485250B2Nov 26, 2002

Substrate transport apparatus with multiple arms on a common axis of rotation

BROOKS AUTOMATION INC136 citations98
US6481956B1Nov 19, 2002

Method of transferring substrates with two different substrate holding end effectors

BROOKS AUTOMATION INC95 citations98
US6158941ADec 12, 2000

Substrate transport apparatus with double substrate holders

BROOKS AUTOMATION INC496 citations98
US6318945B1Nov 20, 2001

Substrate processing apparatus with vertically stacked load lock and substrate transport robot

BROOKS AUTOMATION INC59 citations96
US6309161B1Oct 30, 2001

Load lock with vertically movable support

BROOKS AUTOMATION INC69 citations96
US6299404B1Oct 9, 2001

Substrate transport apparatus with double substrate holders

BROOKS AUTOMATION INC55 citations96
US5647724AJul 15, 1997

Substrate transport apparatus with dual substrate holders

BROOKS AUTOMATION INC67 citations95
US5765983AJun 16, 1998

Robot handling apparatus

BROOKS AUTOMATION INC55 citations93
US7572092B2Aug 11, 2009

Substrate alignment system

BROOKS AUTOMATION INC28 citations92
US6960057B1Nov 1, 2005

Substrate transport apparatus

BROOKS AUTOMATION INC42 citations92
US6231297B1May 15, 2001

Substrate transport apparatus with angled arms

BROOKS AUTOMATION INC20 citations92
US6139245AOct 31, 2000

Robot arm relocation system

BROOKS AUTOMATION INC33 citations92
US5997235ADec 7, 1999

Swap out plate and assembly

BROOKS AUTOMATION INC40 citations92
US5954472ASep 21, 1999

Batch loader arm

BROOKS AUTOMATION INC32 citations92
US7255524B2Aug 14, 2007

Substrate cassette mapper

BROOKS AUTOMATION INC13 citations84
US7192791B2Mar 20, 2007

Semiconductor wafer having an edge based identification feature

BROOKS AUTOMATION INC16 citations84
US5743704AApr 28, 1998

Wide wrist articulated arm transfer device

BROOKS AUTOMATION INC19 citations84
US5769184AJun 23, 1998

Coaxial drive elevator

BROOKS AUTOMATION INC3 citations63

(unassigned)

1 patent

BROOKS AUTOMATION

1 patent

QUINCY TECHNOLOGIES INC

1 patent

WALMART APOLLO LLC

1 patent

HOFMEISTER CHRISTOPHER A

1 patent