Inventor
HOFMEISTER CHRISTOPHER A
US24 patents
⚠️ This page may combine multiple inventors who share the name “HOFMEISTER CHRISTOPHER A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
19 patentsUS6002840ADec 14, 1999
Substrate transport apparatus
BROOKS AUTOMATION INC144 citations99
US6485250B2Nov 26, 2002
Substrate transport apparatus with multiple arms on a common axis of rotation
BROOKS AUTOMATION INC136 citations98
US6481956B1Nov 19, 2002
Method of transferring substrates with two different substrate holding end effectors
BROOKS AUTOMATION INC95 citations98
US6158941ADec 12, 2000
Substrate transport apparatus with double substrate holders
BROOKS AUTOMATION INC496 citations98
US6318945B1Nov 20, 2001
Substrate processing apparatus with vertically stacked load lock and substrate transport robot
BROOKS AUTOMATION INC59 citations96
US6309161B1Oct 30, 2001
Load lock with vertically movable support
BROOKS AUTOMATION INC69 citations96
US6299404B1Oct 9, 2001
Substrate transport apparatus with double substrate holders
BROOKS AUTOMATION INC55 citations96
US5647724AJul 15, 1997
Substrate transport apparatus with dual substrate holders
BROOKS AUTOMATION INC67 citations95
US5765983AJun 16, 1998
Robot handling apparatus
BROOKS AUTOMATION INC55 citations93
US7572092B2Aug 11, 2009
Substrate alignment system
BROOKS AUTOMATION INC28 citations92
US6960057B1Nov 1, 2005
Substrate transport apparatus
BROOKS AUTOMATION INC42 citations92
US6231297B1May 15, 2001
Substrate transport apparatus with angled arms
BROOKS AUTOMATION INC20 citations92
US6139245AOct 31, 2000
Robot arm relocation system
BROOKS AUTOMATION INC33 citations92
US5997235ADec 7, 1999
Swap out plate and assembly
BROOKS AUTOMATION INC40 citations92
US5954472ASep 21, 1999
Batch loader arm
BROOKS AUTOMATION INC32 citations92
US7255524B2Aug 14, 2007
Substrate cassette mapper
BROOKS AUTOMATION INC13 citations84
US7192791B2Mar 20, 2007
Semiconductor wafer having an edge based identification feature
BROOKS AUTOMATION INC16 citations84
US5743704AApr 28, 1998
Wide wrist articulated arm transfer device
BROOKS AUTOMATION INC19 citations84
US5769184AJun 23, 1998
Coaxial drive elevator
BROOKS AUTOMATION INC3 citations63