Inventor
SAKODA TOMOYUKI
US8 patents
⚠️ This page may combine multiple inventors who share the name “SAKODA TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
5 patentsUS6713342B2Mar 30, 2004
FeRAM sidewall diffusion barrier etch
TEXAS INSTRUMENTS INC78 citations97
US6485988B2Nov 26, 2002
Hydrogen-free contact etch for ferroelectric capacitor formation
TEXAS INSTRUMENTS INC191 citations97
US6303952B1Oct 16, 2001
Contact structure with an oxide silicidation barrier
TEXAS INSTRUMENTS INC17 citations83
US6275408B1Aug 14, 2001
Ferroelectric memory and method
TEXAS INSTRUMENTS INC6 citations73
US6238932B1May 29, 2001
Method for fabricating reliable multilayer bottom electrode for ferroelectric capacitors
TEXAS INSTRUMENTS INC6 citations62