Inventor
MAUTZ KARL E
US10 patents
⚠️ This page may combine multiple inventors who share the name “MAUTZ KARL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
8 patentsUS4902377AFeb 20, 1990
Sloped contact etch process
MOTOROLA INC106 citations92
US4698128AOct 6, 1987
Sloped contact etch process
MOTOROLA INC64 citations90
US6663340B1Dec 16, 2003
Wafer carrier transport system for tool bays
MOTOROLA INC45 citations88
US5476816ADec 19, 1995
Process for etching an insulating layer after a metal etching step
MOTOROLA INC48 citations84
US6737205B2May 18, 2004
Arrangement and method for transferring a pattern from a mask to a wafer
MOTOROLA INC11 citations69
US6495802B1Dec 17, 2002
Temperature-controlled chuck and method for controlling the temperature of a substantially flat object
MOTOROLA INC9 citations67
US5496438AMar 5, 1996
Method of removing photo resist
MOTOROLA INC10 citations65
US6709312B2Mar 23, 2004
Method and apparatus for monitoring a polishing condition of a surface of a wafer in a polishing process
MOTOROLA INC2 citations61