Inventor

CARPENTER CRAIG M

US44 patents

⚠️ This page may combine multiple inventors who share the name “CARPENTER CRAIG M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CARPENTER CRAIG M

MICRON TECHNOLOGY INC

Apparatus and method for depositing materials onto microelectronic workpieces

Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces

Apparatus and method for depositing materials onto microelectronic workpieces

Deposition apparatuses configured for utilizing phased microwave radiation

Chemical vapor deposition apparatus

Method for delivering precursors

CVD apparatuses and methods of forming a layer over a semiconductor substrate

Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process

Polishing slurry and method for chemical-mechanical polishing

Laser assisted material deposition

Chemically sensitive warning apparatus and method

Chemical vapor deposition methods

Engagement mechanism for semiconductor substrate deposition process kit hardware

Method of replacing at least a portion of a semiconductor substrate deposition chamber liner

Plasma enhanced chemical vapor deposition process

Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies

Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers

Chemical vapor deposition method

Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces

Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor

Polishing slurry and method for chemical-mechanical polishing

Chemical vapor deposition apparatus and deposition method

Deposition methods utilizing microwave excitation

Chemical vapor deposition apparatus

Semiconductor substrate deposition processor chamber liner apparatus

Methods and apparatus for vapor processing of micro-device workpieces

Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies

Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates

Method of removing surface protrusions from thin films

Methods for forming and cleaning photolithography reticles

Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces

Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces

Chemical vapor deposition methods

Methods and processes utilizing microwave excitation

CVD apparatuses and methods of forming a layer over a semiconductor substrate

Semiconductor substrate processing chamber and accessory attachment interfacial structure

Heated gas line body feedthrough for vapor and gas delivery systems and methods for employing same

Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies

Method of removing surface protrusions from thin films

Method of removing surface protrusions from thin films

GLOBAL ADVANCED METALS USA INC

Methods of producing deformed metal articles

Methods of producing deformed metal articles

MICRON DISPLAY TECH INC

Planarized base assembly and flat panel display device using the planarized base assembly

CARPENTER CRAIG M

Front-end loader for prosthetic occluders and methods thereof