Inventor
HAMER KEVIN T
US8 patents
Patents
8 patentsUS6677250B2Jan 13, 2004
CVD apparatuses and methods of forming a layer over a semiconductor substrate
MICRON TECHNOLOGY INC56 citations96
US6800172B2Oct 5, 2004
Interfacial structure for semiconductor substrate processing chambers and substrate transfer chambers and for semiconductor substrate processing chambers and accessory attachments, and semiconductor substrate processor
MICRON TECHNOLOGY INC30 citations91
US6950178B2Sep 27, 2005
Method and system for monitoring plasma using optical emission spectroscopy
MICRON TECHNOLOGY INC6 citations73
US6936547B2Aug 30, 2005
Gas delivery system for deposition processes, and methods of using same
MICRON TECHNOLOGY INC5 citations63
US6849133B2Feb 1, 2005
CVD apparatuses and methods of forming a layer over a semiconductor substrate
MICRON TECHNOLOGY INC4 citations62
US7192487B2Mar 20, 2007
Semiconductor substrate processing chamber and accessory attachment interfacial structure
MICRON TECHNOLOGY INC3 citations61
US7354631B2Apr 8, 2008
Chemical vapor deposition apparatus and methods
MICRON TECHNOLOGY INC5 citations56
US7312857B2Dec 25, 2007
Method and system for monitoring plasma using optical emission spectrometry
MICRON TECHNOLOGY INC1 citations51