Inventor
ABE TATSUO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “ABE TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
6 patentsUS6374834B1Apr 23, 2002
Substrate processing method and processing apparatus
SHINETSU HANDOTAI KK24 citations88
US5914281AJun 22, 1999
Apparatus for etching wafer
SHINETSU HANDOTAI KK10 citations73
US11177125B2Nov 16, 2021
Method for cleaning semiconductor wafer
SHINETSU HANDOTAI KK0 citations58
US11094525B2Aug 17, 2021
Method for cleaning semiconductor wafer
SHINETSU HANDOTAI KK0 citations58
US11878329B2Jan 23, 2024
Method for cleaning silicon wafer
SHINETSU HANDOTAI KK0 citations48
US11222780B2Jan 11, 2022
Method for evaluating silicon wafer and method for manufacturing silicon wafer
SHINETSU HANDOTAI KK0 citations48
ABE TATSUO
3 patentsSHIN ETSU HANDOTAI CO LTD
3 patentsUS12440943B2Oct 14, 2025
Method and apparatus for polishing wafer
SHIN ETSU HANDOTAI CO LTD0 citations57
US12482647B2Nov 25, 2025
Method for forming thermal oxide film on semiconductor substrate
SHIN ETSU HANDOTAI CO LTD0 citations50
US12308225B2May 20, 2025
Method for forming thermal oxide film on semiconductor substrate
SHIN ETSU HANDOTAI CO LTD0 citations50