Inventor
LU TOH-MING
US16 patents
⚠️ This page may combine multiple inventors who share the name “LU TOH-MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RENSSELAER POLYTECH INST
13 patentsUS6527855B2Mar 4, 2003
Atomic layer deposition of cobalt from cobalt metallorganic compounds
RENSSELAER POLYTECH INST87 citations95
US5268202ADec 7, 1993
Vapor deposition of parylene-F using 1,4-bis (trifluoromethyl) benzene
RENSSELAER POLYTECH INST82 citations93
US4944961AJul 31, 1990
Deposition of metals on stepped surfaces
RENSSELAER POLYTECH INST85 citations91
US6782154B2Aug 24, 2004
Ultrafast all-optical switch using carbon nanotube polymer composites
RENSSELAER POLYTECH INST41 citations90
US6022595AFeb 8, 2000
Increase of deposition rate of vapor deposited polymer by electric field
RENSSELAER POLYTECH INST16 citations82
US7019386B2Mar 28, 2006
Siloxane epoxy polymers for low-k dielectric applications
RENSSELAER POLYTECH INST11 citations81
US7285842B2Oct 23, 2007
Siloxane epoxy polymers as metal diffusion barriers to reduce electromigration
RENSSELAER POLYTECH INST2 citations60
US6818990B2Nov 16, 2004
Fluorine diffusion barriers for fluorinated dielectrics in integrated circuits
RENSSELAER POLYTECH INST4 citations60
US11670804B2Jun 6, 2023
Scalable silicon anodes and the role of parylene films in improving electrode performance characteristics in energy storage systems
RENSSELAER POLYTECH INST0 citations59
US11024889B2Jun 1, 2021
Scalable silicon anodes and the role of parylene films in improving electrode performance characteristics in energy storage systems
RENSSELAER POLYTECH INST0 citations59
US7244670B2Jul 17, 2007
Enhanced step coverage of thin films on patterned substrates by oblique angle PVD
RENSSELAER POLYTECH INST4 citations54
US9120671B2Sep 1, 2015
Ultrathin magnesium nanoblades
RENSSELAER POLYTECH INST0 citations51
US7501154B2Mar 10, 2009
Surface modification of CVD polymer films
RENSSELAER POLYTECH INST4 citations51