Inventor

DOI ATSUMASA

JP2 patents

Patents

2 patents

US6797339B2Sep 28, 2004

Method for forming thin film with a gas cluster ion beam

JAPAN RES DEV CORP82 citations95

US6797334B2Sep 28, 2004

Method for forming gas cluster and method for forming thin film

JAPAN RES DEV CORP17 citations81