Inventor

SCHERUEBL THOMAS

DE18 patents

⚠️ This page may combine multiple inventors who share the name “SCHERUEBL THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHERUEBL THOMAS

ZEISS CARL SMS GMBH

Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection

Method for analyzing a photomask

Arrangement for inspecting objects, especially masks in microlithography

ZEISS CARL SMT GMBH

Method for detecting a structure of a lithography mask and device for carrying out the method

Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation model

Method for correcting the critical dimension uniformity of a photomask for semiconductor lithography

ZEISS CARL JENA GMBH

Confocal microscopic device

Microscope with light source

SCHERUEBL THOMAS

Method and apparatus for measuring of masks for the photo-lithography

Verification method for repairs on photolithography masks

ZEISS STIFTUNG

Confocal microscope with a motorized scanning table

ZEISS CARL MICROELECTRONIC SYS

Automatic focusing device for an optical appliance

CARL ZEISS MICROELECTRIC SYSTE

Imaging system for an extreme ultraviolet (EUV) beam-based microscope

STROESSNER ULRICH

Method for analyzing masks for photolithography

NUFLARE TECHNOLOGY INC

TOTZECK MICHAEL

Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection

ARNZ MICHAEL

Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section

KIENZLE OLIVER

Method and apparatus for analyzing a group of photolithographic masks