Inventor

ROSENKRANZ NORBERT

DE5 patents

⚠️ This page may combine multiple inventors who share the name “ROSENKRANZ NORBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMS GMBH

1 patent

US7286284B2Oct 23, 2007

Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection

ZEISS CARL SMS GMBH13 citations82

CARL ZEISS MICROELECTRIC SYSTE

1 patent

US6894837B2May 17, 2005

Imaging system for an extreme ultraviolet (EUV) beam-based microscope

CARL ZEISS MICROELECTRIC SYSTE6 citations70

TOTZECK MICHAEL

1 patent

USRE44216EMay 14, 2013

Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection

TOTZECK MICHAEL0 citations50

MATEJKA ULRICH

1 patent

US8970951B2Mar 3, 2015

Mask inspection microscope with variable illumination setting

MATEJKA ULRICH0 citations34

KIENZLE OLIVER

1 patent

US8264535B2Sep 11, 2012

Method and apparatus for analyzing a group of photolithographic masks

KIENZLE OLIVER0 citations27