Inventor
GREIF-WUESTENBECKER JOERN
DE7 patents
⚠️ This page may combine multiple inventors who share the name “GREIF-WUESTENBECKER JOERN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMS GMBH
4 patentsUS7286284B2Oct 23, 2007
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection
ZEISS CARL SMS GMBH13 citations82
US7535640B2May 19, 2009
Imaging system for emulation of a high aperture scanning system
ZEISS CARL SMS GMBH7 citations71
US7961297B2Jun 14, 2011
Method for determining intensity distribution in the image plane of a projection exposure arrangement
ZEISS CARL SMS GMBH1 citations50
US7626689B2Dec 1, 2009
Method and device for analysing the imaging behavior of an optical imaging element
ZEISS CARL SMS GMBH1 citations49